Roll-To-Roll Sputtering

Bobst Group SA Roll-To-Roll Sputtering

Sputteringanlage GVE/Optilab: Rolle-zu-Rolle-Anlage zum Abscheiden von ultradünnen Schichten (im Nanometerbereich). Die Anlage kann unterschiedliche Materialien (Metalle, Transparente leitfhähige Schichten) auf Folienmaterial abscheiden. Sie ist mit mehreren Sputteringkathoden ausgestattet, d.h. es können mehrere dünne Schichten gleichzeitig abgeschieden werden.
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GVE, Bobst Ltd, Optilab, 2010, Vacuum roll-to-roll sputtering tool with 3 deposition chambers for 2 cathodes each; Complete with: - 520mm web width, bi-directional winding with inter and de-interleave facility. Turbo molecular pumping (mag lev) in all zones. Drum chiller, re heat unit (-20, to +200 deg C). 1100 polycold unit with cryo coils in each sputter zone as well as in the winding zone. A GVE AC medium frequency plasma unit. A post coating resistance monitoring system. (Measuring resistance on the centre line of the web). One Siemens WIN CC touch screen system for controlling the M/C and monitoring system. I/R heating zone (3 heating units). Web biasing system (PSU etc). 1 gen mag c/w 2 x 20 kw pulsed dc. 1 dual mag c/w 2 x 10 kw pulsed dc (c/w hidden anode). MFC’s etc. 1 x fully integrated PEM sputter control system. Original price Euro 1'450'000.-